Feedback-controlled laser fabrication of micromirror substrates.

Short (40-200 μs) single focused CO(2) laser pulses of energy ≳100 μJ were used to fabricate high quality concave micromirror templates on silica and fluoride glass. The ablated features have diameters of ≈20-100 μm and average root-mean-square (RMS) surface microroughness near their center of less than 0.2 nm. Temporally monitoring the fabrication process revealed that it proceeds on a time scale shorter than the laser pulse duration. We implement a fast feedback control loop (≈20 kHz bandwidth) based on the light emitted by the sample that ensures an RMS size dispersion of less than 5% in arrays on chips or in individually fabricated features on an optical fiber tip, a significant improvement over previous approaches using longer pulses and open loop operation.